Sulfur hexafluoride has an extremely high global warming potential (GWP) because of strong absorption of infraredradiation and long atmospheric lifetime which cause the global warming effect. This study is to identify the effects ofdestruction and removal efficiency of SF6 by the addition of conditioning agent (oxygen, water vapor and hydrogen) whenusing the high ionization energy. The irradiation intensity of ionization energy was 2mA, 5mA, 10mA and 15mA. TheSF6 was completely removed with H2O and H2 gas injection at 2mA. Main by-products were HF and F2 gases. HF andF2 gas formation was increased with irradiation intensity increasing. Most of the by-products of particle were sulfur andmetal sulfate.

SF6 (sulfur hexafluoride) gas has an extremely high global warming potential (GWP) because of strong absorption of infrared radiation and long atmospheric lifetime which cause the global warming effect. The objective of this study is to identify the effects of destruction and removal efficiency (DRE) of SF6 by the addition of oxygen, water vapor and hydrogen. The applied dose of ionization energy was 1,028 kGy(5 mA). The initial concentrations of SF6, O2, H2O and H2 gases were 1,000 ppm, 1,000 ppm, 3,000 ppm, 3,000 ppm, respectively. The DRE was increased about 2 times with O2 gas injection. The SF6 was completely removed with H2O and H2 gas injection. By-products formed by SF6 destruction were mainly HF and F2 gases. In addition, SF2, NF3, N2O, SO2, SO2F2, and NOx gases were produced.