Ultrafine titanium carbide particles were synthesized by the reaction of liquid-magnesium and vaporized TiCl+CCl(x = 1 and 2) solution. Fine titanium carbide particles with about 50 nm were successfully produced by combining Ti and C atoms released by chloride reduction of magnesium, and vacuum was then used to remove the residual phases of MgCl and excess Mg. Small amounts of impurities such as O, Fe, Mg and Cl were detected in the product, but such problem can be solved by more precise process control. The lattice parameter of the product was 0.43267 nm, near the standard value. With respect to the reaction kinetics, the activation energy for the reactions of TiCl+CCland Mg was found to 69 kJ/mole, which was about half value against the use of TiCl+CCl, and such higher reactivity of the former contributed to increase the stoichiometry until the level of TiC and decrease the free carbon content below 0.3 wt.%.