High functional micro devices are demanded in a variety of fields. For realising such demands, development of high-precision micro-components installed in the devices are needed. To achieve high-precision in the mold processing of micro-components, the development of mold materials, i.e., the development of WC-Co hardmetal with higher hardness and fracture strength is essential, together with the developments of processing technology of high precision mold and mold-forming technology of high precision micro-components, etc. The role of development of the finer submicro-grained hardmetal in a NEDO national project aiming the integrated development of these all technologies and some results are mainly explained.