In this study, we studied the alignment characteristics of liquid crystal on polyimide substrate when irradiated with ion beam in oblique direction on uniformly coated polyimide substrate. The inclined irradiation angle of the ion beam was set to 30 degree, 45 degree and 60 degree and the characteristics were observed for 1 minute and 2 minutes at an ion beam irradiation intensity of 600 to 3,000 eV for each angle. The Alignment of the liquid crystals were observed using a polarized microscope after preparing antiparallel specimens. The pretilt angle of the liquid crystal using the crystal rotation method was measured, and the applicability to actual products was evaluated. Experimental results showed that uniformly aligned liquid crystals could be obtained in samples irradiated at 1 and 2 minutes with an ion beam intensity of 1200 eV or higher when irradiated with 30 degree and 45 degree tilted ion beams. And, at 60 tilted degree, It shows that uniformly aligned liquid crystals could be obtained in samples irradiated at 1 and 2 minutes with an ion beam intensity of 2400 eV or higher. The pretilt angle of the liquid crystal showed the best characteristics when irradiated with ion beam inclined at 45 degrees, and it was confirmed that the pretilt angle was 0.2 to 1.3 degrees, which is usable for horizontally oriented LCD.