Molybdenum-tungsten (Mo-W) alloy sputtering targets are widely utilized in fields like electronics, nanotechnology, sensors, and as gate electrodes for TFT-LCDs, owing to their superior properties such as hightemperature stability, low thermal expansion coefficient, electrical conductivity, and corrosion resistance. To achieve optimal performance in application, these targets’ purity, relative density, and grain size of these targets must be carefully controlled. We utilized nanopowders, prepared via the Pechini method, to obtain uniform and fine powders, then carried out spark plasma sintering (SPS) to densify these powders. Our studies revealed that the sintered compacts made from these nanopowders exhibited outstanding features, such as a high relative density of more than 99%, consistent grain size of 3.43 μm, and shape, absence of preferred orientation.

The passivation and oxidation process of tungsten and molybdenum narlopowders, produced by electrical explosion of wires was studied by means of FE-SEM, XPS. XRD, TEM, DIA-TGA and sire distribution analysis. In addition, the phase transformation of W and Mo nanopowders under oxidation in air was investigated. A chemical process is suggested for the oxidation of W and Mo nano-particles after a comprehensive testing of passivated and oxidized powders.