이온빔 조사방법을 이용한 SiOF 기판상의 수평배향 엘시디 표시소자의 특성에 관한 연구

조명현; 김원배; 이호영

논문 상세보기

이온빔 조사방법을 이용한 SiOF 기판상의 수평배향 엘시디 표시소자의 특성에 관한 연구 KCI 등재

Study of Homogeneous Alignment LCD Device using Ion-beam Irradiation method on SiOF Substrates

조명현, 김원배, 이호영

언어KOR
URLhttps://db.koreascholar.com/Article/Detail/298860

구독 기관 인증 시 무료 이용이 가능합니다. 4,000원

한국기계기술학회지 (Journal of the Korean Society of Mechanical Technology)

제17권 제2호 (2015.04)
pp.335-340

한국기계기술학회 (Korean Society of Mechanical Technology)

초록

Nematic liquid crystal (NLC) alignment effects on SiOF layers via ion-beam(IB) irradiation for four types of incident energy were successfully studied. The effect of fluorine addition on silicon oxide film properties as a function of SiOF₄/O₂gas flow ration was investigated. The SiOF thin film exhibits good chemical and the thermal stability of the SiOF thin film were sustained as function of the NLC alignment until 200℃. Also, the response-time characteristics of aligned LCD based on SiOF film were studied.

키워드

Liquid Crystal 액정 Ion-beam Irradiation 이온빔 조사 SiOFx Substrates 기판 Liquid Crystal Alignment 액정배향 Homogeneous Alignment 수평배향

1. INTRODUCTION
2. EXPERIMENTS
3. RESULTS AND DISC USSIO N
4. CONCLUSIONS
Acknowledgements
References

저자

조명현(Member, Seoil University) | Myung-Hyun Cho Corresponding author
김원배(SongWon University) | Won- Bae Kim
이호영(Chodang University) | Ho-Young Lee

같은 권호 다른 논문