The -zirconium phosphate particles as fine as 20 nm were fabricated through solution technique using and as precursors. Stability of -Zirconium phosphate could be ensured by adding excess phosphoric acid to a stoichiometric composition Instead of using reflux route that resulted in coarsening of particles due to an inevitably long aging. The excess phosphorous incorporated in the crystal could be successfully eliminated afterwards through careful washing. Moreover, heavily agglomerated particles are observed before washing, but fairly dispersed state is found out after washing treatment. Thus, it is found that dispersed state as well as phase stability is ensured through proper washing treatment.