In order to investigate functional groups on the surface of Multi-walled Carbon Nanotubes (MWCNTs) induced by oxyfluorination, XPS (X-ray photoelectron spectroscopy) analysis was carried out. All core level spectra of MWCNTs were deconvoluted to several Pseudo-Voigt functions (sum of Gaussian-Lorentzian functions). Both O1s and F1s binding energy of oxyfluorinated MWCNTs shifted high value as increment of fluorine mixing ratio. The carbon-fluorine covalent bonding concentration increased as increment of fluorine mixing ratio. The shape and intensity of OF10-MWCNTs are similar with those of as-received MWCNTs. However, the intensity and binding energies of main peak position of OF20-MWCNTs and OF30-MWCNTs were dramatically increased by oxyfluorination.