This paper describes the surface modification effect of a Ti substrate for improved dispersibility of the cat-alytic metal. Etching of a pure titanium substrate was conducted in 50% H₂SO₄, 50˚C for 1h-12h to observe the sur-face roughness as a function of the etching time. At 1h, the grain boundaries were obvious and the crystal grains weredistinguishable. The grain surface showed micro-porosities owing to the formation of micro-pits less than 1 µm in diam-eter. The depths of the grain boundary and micro-pits appear to increase with etching time. After synthesizing the cat-alytic metal and growing the carbon nano tube (CNT) on Ti substrate with varying surface roughness, the distributiontrends of the catalytic metal and grown CNT on Ti substrate are discussed from a micro-structural perspective.