The necessity of large-area and high-precision measurements has increased in industry area. The high-speed/high-precision multi probe measurement system has been developed to measure the 3D shape. The three different multi probes are combined in measurement system. This system is synchronized between the probes to measure the same position in the sample. Also this paper shows the measurement results with multi probe measurement system.

Abstract
 1. 서론
 2. 멀티프로브 측정시스템
  2.1 시스템 개요
  2.2 색수차 현미경
  2.3 CLSM(Confocal laser scanning microscope)
  2.4 엘립소미터
  2.5 이종 프로브를 이용한 측정방법 분석
 3. 프로브 동기화 제어 기술
  3.1 XY 스테이지 Mapping
  3.2 프로브 위치 set up
 4. 결론
 References

• 오연택(동명대학교 로봇시스템공학과) | Yeon Taek OH