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        1.
        2014.12 KCI 등재 구독 인증기관 무료, 개인회원 유료
        The necessity of large-area and high-precision measurements has increased in industry area. The high-speed/high-precision multi probe measurement system has been developed to measure the 3D shape. The three different multi probes are combined in measurement system. This system is synchronized between the probes to measure the same position in the sample. Also this paper shows the measurement results with multi probe measurement system.
        4,000원