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다단계 습식 식각을 통한 수소처리된 Al-doped ZnO 박막의 특성 KCI 등재 SCOPUS

Properties of Hydorogenated Al-Doped ZnO Films by Multi-Step Texture

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한국재료학회지 (Korean Journal of Materials Research)
한국재료학회 (Materials Research Society Of Korea)
초록

In this study we investigated the effect of the multi-step texturing process on the electrical and optical properties of hydrogenated Al-doped zinc oxide (HAZO) thin films deposited by rf magnetron sputtering. AZO films on glass were prepared by changing the H2/(Ar+H2) ratio at a low temperature of 150˚C. The prepared HAZO films showed lower resistivity and higher carrier concentration and mobility than those of non-hydrogenated AZO films. After deposition, the surface of the HAZO films was multi-step textured in diluted HCl (0.5%) for the investigation of the change in the optical properties and the surface morphology due to etching. As a result, the HAZO film fabricated under the type III condition showed excellent optical properties with a haze value of 52.3%.

저자
  • 탁성주 | Tark, Sung-Ju
  • 강민구 | 강민구
  • 박성은 | 박성은
  • 김용현 | 김용현
  • 김원목 | 김원목
  • 김동환 | 김동환