The potential application of palladium-ruthenium composite membranes to the separation of hydrogen from chlorosilane gases in silicon-based industries was investigated. Ru/Pd/Al2O3/PSS membranes were prepared by electroless plating. Hydrogen permeation tests and temperature programmed desorption analysis revealed that the addition of a Ru over layer on Pd changed the hydrogen adsorption characteristics, resulting in improved stability of the membrane at low temperatures. The Ru/Pd/Al2 O3/PSS composite membrane had a stable hydrogen permeation flux of 1.8 m3m-2h-1 over a period of 1,200 h at 180°C without suffering hydrogen embrittlement. After exposure to impurities such as HCl and SiHCl3 , the hydrogen permeation flux of the Ru/Pd/Al2 O3/PSS composite membrane was stable over a period of 9h with feed pressure of 2.0 bar at 225°C.

• 황인혁(경기대학교 일반대학원 환경에너지공학과, Department of Environmental Energy Engineering, Graduate School of Kyonggi University) | In-Hyuck Hwang
• 이상문(경기대학교 환경에너지공학과, Department of Environmental Energy Engineering, Kyonggi University) | Sang Moon Lee
• 김성수(경기대학교 환경에너지공학과, Department of Environmental Energy Engineering, Kyonggi University) | Sung Su Kim