As a result of frequent occurrence of serious industrial accidents due to chemical substances, Korea Occupational Safety & Health Agency has been implementing the PSM system (process safety management) since 1996, and the target sites are required to submit process safety reports. In the semiconductor business, which is becoming smaller and more integrated as the technology advances, many of these hazardous chemicals are used. Most of the semiconductor sites are PSM target sites, and many devices are included in the PSM target equipment. This study optimizes the introduction and setup process of new equipments in the semiconductor workplace using harmful hazardous materials, and conducted an empirical study on the improvement of the safety risk, focusing on the S group semiconductor business, and applied the common standard of work under the PSM system This is an example of improving the risk of leakage of toxic gas components and waste of rework by arranging functions and risks in the space centering method