Manufacturing technologies of compound semiconductor are similar to the process of memory device, but management technology of manufacturing process for compound semiconductor is not enough developed. Semiconductor manufacturing environment also has been emerged as mass customization and open foundry service so integrated manufacturing system is needed. In this study we design the integrated manufacturing system for compound semiconductor fabrication that has monitoring of process, reduction of lead-time, obedience of due-dates and so on. This study presents integrated manufacturing system having database system that based on web and data acquisition system. And we will implement them in the actual compound semiconductor fabrication.

Abstract
 1. 서론
 2. 화합물 반도체 제조공정과 Foundry Service
 3. 통합생산시스템 설계 및 구축
  3.1 제조공정 프로세스 분석
  3.2 제조공정정보 수집을 위한 DAS(Data Acquisition System) 설계
 4. 결론
 후기
 참고문헌

• 이승우(한국기계연구원)
• 박지훈(나리지온 부설연구소)
• 박재우(나리지온 부설연구소)
• 이화기(인하대학교 산업공학과)