Cooling towers have been widely applied to control the indoor temperature in the residential area and the living space. At operating the cooling towers, motor, fan and dropping water produce noise and vibration, which diffuse through the air or the solid object, polluting the environment. The standards can be used at estimating noise and vibration emission by showing remarkable economic or social benefits. The purpose of this study is to show the vibration and noise measurement and influence evaluation between cooling towers and semiconductor equipment.

Abstract
 1. 서론
 2. 냉각탑의 진동소음 특성 및 평가
  2.1 냉각탑의 진동 측정 및 평가
  2.2 냉각탑의 소음 측정 및 평가
 3. 측정대상 및 방법
 4. 측정 결과 및 고찰
  4.1 냉각탑의 진동
  4.2 냉각탑의 소음
  4.3 냉각탑과 정밀장비 바닥의 진동
 5. 결론
 References

• 이진갑(Gyeonggi College of Science and Technology) | J. K. LEE Corresponding Author