In this study, a core-shell powder and sintered specimens using a mechanically alloyed (MAed) Ti-Mo powder fabricated through high-energy ball-milling are prepared. Analysis of sintering, microstructure, and mechanical properties confirms the applicability of the powder as a sputtering target material. To optimize the MAed Ti-Mo powder milling process, phase and elemental analyses of the powders are performed according to milling time. The results reveal that 20 h of milling time is the most suitable for the manufacturing process. Subsequently, the MAed Ti-Mo powder and MoO3 powder are milled using a 3-D mixer and heat-treated for hydrogen reduction to manufacture the core-shell powder. The reduced core-shell powder is transformed to sintered specimens through molding and sintering at 1300 and 1400oC. The sintering properties are analyzed through X-ray diffraction and scanning electron microscopy for phase and porosity analyses. Moreover, the microstructure of the powder is investigated through optical microscopy and electron probe microstructure analysis. The Ti-Mo core-shell sintered specimen is found to possess high density, uniform microstructure, and excellent hardness properties. These results indicate that the Ti-Mo core-shell sintered specimen has excellent sintering properties and is suitable as a sputtering target material.

1. Introduction
2. Experimental
3. Results and Discussion
4. Conclusion
Acknowledgement
References

• 이원희(한양대학교 신소재공학부) | Won Hee Lee (Department of Materials Science and Engineering, Hanyang University, Seoul 04763, Republic of Korea)
• 박천웅(한양대학교 신소재공학부) | Chun Woong Park (Department of Materials Science and Engineering, Hanyang University, Seoul 04763, Republic of Korea)
• 김희연(한양대학교 신소재공학부) | Heeyeon Kim (Department of Materials Science and Engineering, Hanyang University, Seoul 04763, Republic of Korea)
• 하윤철(한양대학교 신소재공학부) | Yuncheol Ha (Department of Materials Science and Engineering, Hanyang University, Seoul 04763, Republic of Korea)
• 변종민(서울과학기술대학교 신소재공학과) | Jongmin Byun (Department of Materials Science and Engineering, Seoul National University of Science and Technology, Seoul 01811, Republic of Korea)
• 김영도(한양대학교 신소재공학부) | Young Do Kim (Department of Materials Science and Engineering, Hanyang University, Seoul 04763, Republic of Korea) Corresponding author