This study is aimed at preparing and evaluating the plasma resistance of YAS (Y2O3-Al2O3-SiO2) coating layer with crystalline YAG phase contents. For this purpose, YAS frits with controlled phase contents are prepared and melt-coated on sintered Al2O3 ceramics. Then, the results of phase analysis of crystalline YAS coating layer are compared to that of YAS frits, and discussed with regard to the plasma resistance of the YAS coating layer. The phase contents of the YAS frit change in a manner different from that of the prepared YAS coating layer, presumably owing to the composition change of YAS frit during the melt-coating process. The plasma resistance of the YAS coating layer is shown to increase with the YAG phase contents in the coating layer. Comparing the weight loss of YAS coating layer with those of commercial Y2O3, Al2O3, and quartz ceramics, the plasma resistance of the prepared YAS coating layer is 8 times higher than that of quartz and 3 times higher than that of Al2O3; this layer shows 70 % of the resistance of Y2O3.

This study is aimed at improving the plasma resistance of Al2O3 ceramics on which plasma resistant YAS(Y2O3- Al2O3-SiO2) frit is melt-coated using a simple heat-treatment process. For this purpose, the results of phase analysis and microstructural observations of the prepared YAS frits and the coating layers on the Al2O3 ceramics according to the batch compositions are compared and discussed with regard to the results of plasma resistance test. The prepared YAS frits consist of crystalline or amorphous or co-existing crystalline and amorphous phases according to the batch compositions, depending on the role and content of each raw material. The prepared YAS frit is melt-coated on the densely sintered Al2O3 ceramics, resulting in a dense coating layer with a thickness of at least ~ 80 m. The YAS coating layer consists of crystalline YAG(Y3Al5O12), Y2Si2O7, and Al2O3 phases, and YAS glass phase. Plasma resistance of YAS coated Al2O3 ceramics is strongly dependent on the content of the YAG(Y3Al5O12) and Y2Si2O7 crystalline phases in the coating layer, especially on the content of the YAG phase. Comparing the weight loss of YAS coating ceramics with values obtained for commercial Y2O3, Al2O3, and quartz ceramics, the plasma resistance of the YAS coating ceramics is 6 times higher than that of quartz, 2 times higher than that of Al2O3, and 50 % of the resistance of Y2O3.