This study is aimed at preparing and evaluating the plasma resistance of YAS (Y2O3-Al2O3-SiO2) coating layer with crystalline YAG phase contents. For this purpose, YAS frits with controlled phase contents are prepared and melt-coated on sintered Al2O3 ceramics. Then, the results of phase analysis of crystalline YAS coating layer are compared to that of YAS frits, and discussed with regard to the plasma resistance of the YAS coating layer. The phase contents of the YAS frit change in a manner different from that of the prepared YAS coating layer, presumably owing to the composition change of YAS frit during the melt-coating process. The plasma resistance of the YAS coating layer is shown to increase with the YAG phase contents in the coating layer. Comparing the weight loss of YAS coating layer with those of commercial Y2O3, Al2O3, and quartz ceramics, the plasma resistance of the prepared YAS coating layer is 8 times higher than that of quartz and 3 times higher than that of Al2O3; this layer shows 70 % of the resistance of Y2O3.

This study is aimed at improving the plasma resistance of Al2O3 ceramics on which plasma resistant YAS(Y2O3- Al2O3-SiO2) frit is melt-coated using a simple heat-treatment process. For this purpose, the results of phase analysis and microstructural observations of the prepared YAS frits and the coating layers on the Al2O3 ceramics according to the batch compositions are compared and discussed with regard to the results of plasma resistance test. The prepared YAS frits consist of crystalline or amorphous or co-existing crystalline and amorphous phases according to the batch compositions, depending on the role and content of each raw material. The prepared YAS frit is melt-coated on the densely sintered Al2O3 ceramics, resulting in a dense coating layer with a thickness of at least ~ 80 m. The YAS coating layer consists of crystalline YAG(Y3Al5O12), Y2Si2O7, and Al2O3 phases, and YAS glass phase. Plasma resistance of YAS coated Al2O3 ceramics is strongly dependent on the content of the YAG(Y3Al5O12) and Y2Si2O7 crystalline phases in the coating layer, especially on the content of the YAG phase. Comparing the weight loss of YAS coating ceramics with values obtained for commercial Y2O3, Al2O3, and quartz ceramics, the plasma resistance of the YAS coating ceramics is 6 times higher than that of quartz, 2 times higher than that of Al2O3, and 50 % of the resistance of Y2O3.

Homogeneous multicomponent indium gallium zinc oxide (IGZO) ceramics for transparent electrode targets are prepared from the oxides and nitrates as the source materials, and their properties are characterized. The selected compositions were In2O3:Ga2O3:ZnO = 1:1:2, 1:1:6, and 1:1:12 in mole ratio based on oxide. As revealed by X-ray diffraction analysis, calcination of the selected oxide or nitrides at 1200oC results in the formation of InGaZnO4, InGaZn3O6, and InGaZn5O8 phases. The 1:1:2, 1:1:6, and 1:1:12 oxide samples pressed in the form of discs exhibit relative densities of 96.9, 93.2, and 84.1%, respectively, after sintering at 1450oC for 12 h. The InGaZn3O6 ceramics prepared from the oxide or nitrate batches comprise large grains and exhibit homogeneous elemental distribution. Under optimized conditions, IGZO multicomponent ceramics with controlled phases, high densities, and homogeneous microstructures (grain and elemental distribution) are obtained.

Al2O3-SiC ceramic composites are produced using pressureless sintering, and their plasma resistance, electrical resistance, and mechanical properties are evaluated to confirm their applicability as electrostatic-discharge-safe components for semiconductor devices. Through the addition of Mg and Y nitrate sintering aids, it is confirmed that even if SiC content exceeded 10%, complete densification is possible by pressureless sintering. By the uniform distribution of SiC, the total grain growth is suppressed to about 1 μm; thus an Al2O3-SiC sintered body with a high strength over 600 MPa is obtained. The optimum amount of SiC to satisfy all the desired properties of electrostatic-discharge-safe ceramic components is obtained by finding the correlation between the plasma resistance and the electrical resistivity as a function of SiC amount.

Waste oyster shells create several serious problems; however, only some parts of them are being utilized currently. The ideal solution would be to convert the waste shells into a product that is both environmentally beneficial and economically viable. An experimental study is carried out to investigate the recycling possibilities for oyster shell waste. Bulk ceramic bodies are produced from the oyster shell powder in three sequential processes. First, the shell powder is calcined to form calcium oxide CaO, which is then slaked by a slaking reaction with water to produce calcium hydroxide Ca(OH)2. Then, calcium hydroxide powder is formed by uniaxial pressing. Finally, the calcium hydroxide compact is reconverted to calcium carbonate via a carbonation reaction with carbon dioxide released from the shell powder bed during firing at 550oC. The bulk body obtained from waste oyster shells could be utilized as a marine structural porous material.

Silica nano-powder (SNP) is an inorganic material able to provide high-performance in various fields because of its multiple functions. Methods used to synthesize high purity SNP, include crushing silica minerals, vapor reaction of silica chloride, and a sol-gel process using TEOS and sodium silicate solution. The sol-gel process is the cheapest method for synthesis of SNP, and was used in this study. First, we investigated the shape and the size of the silica-powder particles in relation to the variation of HCl and sodium silicate concentrations. After drying, the shape of nano-silica powder differed in relation to variations in the HCl concentration. As the pH of the solution increased, so did the density of crosslinking. Initially, there was NaCl in the SNP. To increase its purity, we adopted a washing process that included centrifugation and filtration. After washing, the last of the NaCl was removed using DI water, leaving only amorphous silica powder. The purity of nano-silica powder synthesized using sodium silicate was over 99.6%.

The unique features of spark plasma sintering process are the possibilities of a very fast heating rate and a short holding time to obtain fully dense materials. -SiC powder with 0, 2, 6, 10 wt% of -SiC particles (seeds) and 4 wt% of Al-B-C (sintering aids) were spark plasma sintered at for 10 min. The heating rate, applied pressure and sintering atmosphere were kept at , 40 MPa and a flowing Ar gas (500 CC/min). Microstructural development of SiC as function of seed content and temperature during spark plasma sintering was investigated quantitatively and statistically using image analysis. Quantitative image analyses on the sintered SiC ceramics were conducted on the grain size, aspect ratio and grain size distribution of SiC. The microstructure of SiC sintered up to consisted of equiaxed grains. In contrast, the growth of large elongated SiC grains in small matrix grains was shown in sintered bodies at and the plate-like grains interlocking microstructure had been developed by increasing sintering temperature. The introduction of -SiC seeds into -SiC accelerated the grain growth of elongated grains during sintering, resulting in the plate-like grains interlocking microstructure. In the -SiC seeds added in -SiC, the rate of grain growth decreased with -SiC seed content, however, bulk density and aspect ratio of grains in sintered body increased.

Mechanical alloying using high-energy ball mill and subsequent spark plasma sintering (SPS) process was applied to understand mechanical alloying processing of Al-Fe alloy system. The thermal stability of mechanically alloyed Al-Fe alloy was intended to be enhanced by SPS process. Various analytical techniques including particle size analysis, density measurement, micro-Vickers hardness test, SEM, TEM, and X-ray diffractometry were adopted to find optimum processing conditions for mechanical alloying and subsequent SPS and to estimate thermal stability of the prepared alloy. It was found from the treatment of mechanically alloyed Al-8wt.%Fe powder mixture that needle-shaped precipitates was formed in the Al-Fe matrix, and the alloy compact showed enhanced densification and reached its full density with little loss of its fine microstructure. After heat treatment at , it was also shown that the thermal stability of Al-8wt.%Fe alloy fabricated in the present study was enhanced, which was due to its fine microstructure developed by fast densification of SPS.

Mechanical alloying using high-energy ball mill and subsequent spark plasma sintering (SPS) process was applied to Al-Fe-Cr and Al-Fe-Mo powder mixture to investigate effects of Cr and Mo addition on thermal stability of Al-Fe, and thereby to enhance its thermal stability up to . Various analytical techniques including micro-Vickers hardness test, SEM, TEM, X-ray diffractometry and corrosion test were carried out. It was found that addition of Cr and Mo to Al-Fe system played a role of grain growth inhibitor of matrix Al and some precipitates such as during SPS and subsequent heat treatment. The inhibition of grain growth resulted in increased Vickers hardness and thermal stability up to comparing to those of Al-Fe alloy system.