Al2O3-SiC ceramic composites are produced using pressureless sintering, and their plasma resistance, electrical resistance, and mechanical properties are evaluated to confirm their applicability as electrostatic-discharge-safe components for semiconductor devices. Through the addition of Mg and Y nitrate sintering aids, it is confirmed that even if SiC content exceeded 10%, complete densification is possible by pressureless sintering. By the uniform distribution of SiC, the total grain growth is suppressed to about 1 μm; thus an Al2O3-SiC sintered body with a high strength over 600 MPa is obtained. The optimum amount of SiC to satisfy all the desired properties of electrostatic-discharge-safe ceramic components is obtained by finding the correlation between the plasma resistance and the electrical resistivity as a function of SiC amount.
The synthesis behavior of nanoporous silica aerogel in the macroporous ceramic structure was observed using TEOS as a source material and glycerol as a dry control chemical additive (DCCA). Silica aerogel in the macroporous ceramic structure was synthesized via sono-gel process using hexamethyldiazane (HMDS) as a modification agent and n-hexane as a main solvent. The wet gel with a modified surface was dried at under ambient pressure. The addition of glycerol appears to give the wet gel a more homogeneous microstructure. However, glycerol also retarded the rate of surface modification and solvent exchange. Silica aerogel completely filled the macroporous ceramic structure without defect in the condition of surface modification (20% HMDS/nhexane at 36hr).