As the size of market for electric vehicles and energy storage systems grows, the demand for lithium-ion batteries (LIBs) is increasing. Currently, commercial LIBs are fabricated with liquid electrolytes, which have some safety issues such as low chemical stability, which can cause ignition of fire. As a substitute for liquid electrolytes, solid electrolytes are now being extensively studied. However, solid electrolytes have disadvantages of low ionic conductivity and high resistance at interface between electrode and electrolyte. In this study, Li7La3Zr2O12 (LLZO), one of the best ion conducting materials among oxide based solid electrolytes, is fabricated through RF-sputtering and various electrochemical properties are analyzed. Moreover, the electrochemical properties of LLZO are found to significantly improve with co-sputtered Li2O. An all-solid thin film battery is fabricated by introducing a thin film solid electrolyte and an Li4Ti5O12 (LTO) cathode; resulting electrochemical properties are also analyzed. The LLZO/Li2O (60W) sample shows a very good performance in ionic conductivity of 7.3  108 S/cm, with improvement in c-rate and stable cycle performance.