Ta(OC2H5)5와 NH3를 이용하여 Cycle-CVD법으로 산화탄탈륨 막을 증착하였다. Cycle-CVD법에서는 Ta(OC2H5)5와 NH3사이에 불활성 기체를 주입한다. 하나의 cycle은 Ta(OC2H5)5주입, Ar주입, NH3 주입, Ar 주입의 네 단계로 이루어진다. Cycle-CVD법으로 산화탄탈륨 막을 증착할 때, 온도 250-280˚C에서 박막의 증착 기구는 원자층 증착(Atomic Layer Deposition:ALD)이었다. 265˚C에서 Ta(OC2H5)5:Ar:NH3:Ar:NH3:Ar의 한 cycle에서 각 단계의 주입 시간을 1-60초:5초:5초:5초로 Ta(OC2H5)5 주입 시간을 변화시키면서 산화탄탈륨 막을 Cycle-CVD법으로 증착하였다. Ta(OC2H5)5주입시간이 증가하여도 cycle 당 두께가 1.5Å/cycle로 일정하였다. 265˚C에서 증착된 박막의 누설 전류는 2MV/cm에서 2x10-2A/cm2이었고 열처리후의 산화탄탈륨 막의 누설 전류값은 10-4Acm2 이하고 감소하였다. 증착한 산화탄탈륨 막의 성분을 Auger 전자 분광법으로 분석하였다. 265˚C에서 증착한 막의 성분은 탄탈륨 33at%, 산소 50at%, 탄소 5at%, 질소 12at% 이었으며 900˚C, O2300torr에서 10분 동안 열처리한 박막은 탄탈륨 33at%, 산소 60wt%, 탄소 4at%, 질소 3at%이었다. 박막의 열처리 온도가 높을수록 불순물인 탄소와 질소의 박막 내 잔류량이 감소하였다. 열처리 후의 박막은 O/Ta 화학정량비가 증가하였으며 Ta의 4f7/5와 4f 5/2의 결합 강도가 열처리 전 박막보다 증가하였다. 열처리 후 누설 전류가 감소하는 것은 불순물 감소와 화학정량비 개선 및 Ta-O 결합 강도의증가에 의한 것으로 생각된다.

Grain size has a great impact on rice grain yield and is controlled by quantitative trait loci (QTL). Daeribbyeo 1 with big grain is widely used for genetic materials to develop varieties with diverse grain size. This study was conducted to identify genes controlling grain size traits of Daeribbyeo 1. An F2:3 population derived from a cross between two japonica cultivars, Boseogheugchal and Daeribbyeo1, was used to identify QTL controlling grain shape traits. A total of 284 F2 plants were measured for grain shape traits, grain length (GL), grain width (GW), grain thickness (GT), 1,000 grain weight (TGW), and two morphological traits, pericarp color and waxy endosperm. Sixty F3 lines were selected based on the grain shape traits and marker genotypes and evaluated for grain shape traits. For marker analysis, SSR markers tightly linked to five known grain size genes and two QTLs were selected and used for genotyping. A total of 11 QTLs detected on chromosomes 2, 3, 4 and 6 explained phenotypic variation from 3.9% to 59.3%. qTGW2, qGW2 and qGT2 were detected in the same region between RM12811-RM12837 that are tightly linked with GW2 gene. qTGW3 and qGL3 were detected near GS3 gene. To know whether Daeribbyeo 1 has the same mutations in GW2 and GS3 as the various grain-size genotypes, GW2 and GS3 of two parents were sequenced. Daeribbyeo 1 had the same one base (A) deletion at a position 316 as ‘WY3’ in GW2 which results in the loss of function of GW2 gene. Boseogheugchal showed a C-to-A nonsense mutation in the second exon of GS3 gene that increased grain length. Interaction between GW2 and GS3 was not significant indicating that two genes controlled grain-size traits in additive pathway. The results from this study indicate that three QTLs GW2, qGT4 and qGL6 are associated with the grain size variation in Daeribbyeo 1 with GW2 as the major QTL.