To improve the etch rate of Si3N4 thin film, H2SiF6 is added to increase etching rate by more than two times. SiO3H2 is gradually added to obtain a selectivity of 170: 1 at 600 ppm. Moreover, when SiO3H2 is added, the etching rate of the SiO2 thin film increases in proportion to the radius of the wafer. In Si3N4 thin film, there is no difference in the etching rate according to the position. However, in the SiO2 thin film, the etching rate increases in proportion to the radius. At the center of the wafer, the re-growth phenomenon is confirmed at a specific concentration or above. The difference in etch rates of SiO2 thin films and the reason for regrowth at these positions are interpreted as the result of the flow rate of the chemical solution replaced with fresh solution.

The psychosocial stress and musculoskeletal disorders(MSDs) have been one of major health problems for hospital workers. This study tried to understand the relationship between symptoms associated with MSDs and risk factors such as working posture, job stress, psychosocial stress and fatigue. A total number of 655 hospital workers participated in this study. Specifically, REBA was applied for evaluating working posture and a checklist prepared by KOSHA(Korean Occupational Safety and Health Agency) was used for symptom survey. A questionnaire from KOSHA was also used for collecting data associated with job stress, psychosocial stress and fatigue. All these data were formulated and modeled by path analysis which was one of major statistical tools in this study. Specifically, path analysis for the data we collected came up with several major findings. As a result, as for body part(neck), (waist) and (arms) the degree of risk of work posture measured with the use of job stress(KOSS), psycho-social stress(PWI-SF) and REBA is significantly more affected by fatigue than muscular skeletal disease related consciousness symptom. However, regarding bod(wrist), the degree of risk of work posture measured with the use of job stress(KOSS) and REBA is directly affected by muscular skeletal disease related consciousness symptom. This study is meaningful in that the study clarified the causal relations of the degree of risk of work posture, degree of fatigue, and muscular skeletal disease related consciousness symptoms by each body part measured with the use of work stress(KOSS), psycho-social stress(PWI-SF) and REBA.