Magnetostrictive actuator is fabricated with powder nano bonding method instead of sputtering method. Fabrication process and experimental measurement method for magneto-mechanical characteristics is proposed. For the design of highly flexible magnetostrictive actuator, TbDyFe nano powder bonding with Teflon substrate is adopted. The fabrication process for Teflon substrate and nano powder bonding is suggested and magnetostrictive behaviors are investigated. Variable magnetic field is applied to measure the magnetostrictive characteristics and magnetostriction is measured with different waves and different magnitude of magnetic field.

Numerical analysis of a Ni-PZT stacked piezoelectric micro actuator is investigated for the prediction of mechanical behavior as a preceding research for the manufacturing of three dimensional micro structures. Finite element method is adopted to examine the simulation of a piezoelectric actuator according to applied direction of voltage, by researching displacement characterization of piezoelectric material through piezoelectric theory. PZT-4 is selected as a piezoelectric material. And bimorph finite element modeling is employed to study the response of Ni-PZT bi-layered micro actuator under the various input voltages. The results are presented as maximum displacement values under each applied voltages. Maximum displacement of 0.71μm at 60V is obtained