Numerical analysis of a Ni-PZT stacked piezoelectric micro actuator is investigated for the prediction of mechanical behavior as a preceding research for the manufacturing of three dimensional micro structures. Finite element method is adopted to examine the simulation of a piezoelectric actuator according to applied direction of voltage, by researching displacement characterization of piezoelectric material through piezoelectric theory. PZT-4 is selected as a piezoelectric material. And bimorph finite element modeling is employed to study the response of Ni-PZT bi-layered micro actuator under the various input voltages. The results are presented as maximum displacement values under each applied voltages. Maximum displacement of 0.71μm at 60V is obtained

Abstract
 1. 서론
 2. 이론적 연구
  2.1 압전 재료 특성
  2.2 지배 방정식
  2.3 압전 재료의 거동 특성
 3. 압전 작동기의 모델링 및 경계조건
  3.1 압전 작동기의 물성치
  3.2 압전 작동기의 물성치
 4. 유한요소 해석
 5. 결론
 References

• 이흥식(한양대학교 기계공학부) | Heung-Shik Lee