Using lanthanum zinc oxide (LZO) film with the ion-beam irradiation, uniform and homogeneous liquid crystal (LC) alignment was achieved. To fabricate the LZO thin film on glass substrate, solution process was conducted as a deposition method. Cross-polarized optical microscopy (POM) and the crystal rotation method reveal the state of LC alignment on the ion-beam irradiated LZO film. Between orthogonally placed polarizers, POM image showed constant black color with regular transmittance. Furthermore, collected incidence angle versus transmittance curve from the crystal rotation method revealed that the LC molecules on the ion-beam irradiated LZO film were aligned homogeneously. Atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS) were conducted to reveal the relationship between the ion-beam irradiation and the LC alignment. The ion-beam irradiation changed the LZO film surface to rougher than before by etching effect. Numerical roughness values from AFM analysis supported this phenomenon specifically. XPS analysis showed the chemical composition change due to the ion-beam irradiation by investigation of O 1s, La 3d and Zn 2p spectra. The ion-beam irradiation induced the breakage of chemical bonds in the LZO film surface and this occurred surface chemical anisotropic characteristics for uniform LC alignment.

The ion-beam irradiated lanthanum zinc oxide (LZO) films were conducted as liquid crystal (LC) alignment layer to achieve uniform and homogeneous alignment of LC molecules. Polarized optical microscopy and the pre-tilt angle measurements revealed the alignment characteristics of LC molecules on the LZO film surface. Physical characteristics of the LZO film surface were analyzed by field emission scanning electron microscope and atomic force microscopy. The strong ion-beam irradiation on the LZO film changed surface rougher than before and induced physical anisotropic characteristics. Chemical composition of the LZO film was investigated by X-ray photoelectron spectroscopy and it was revealed that the ion-beam irradiation induced the breakage of the metal-oxide bonds. Due to this, anisotropic dipole moment which related with van der Waals force between LC molecules and alignment layer was induced. Because of this, LC molecules were anchored to the LZO film surface to achieve uniform LC alignment. Collecting the capacitance-voltage curve, residual DC of the LC cell with the LZO films was measured and it was verified that the LC cell with the LZO film had a nearly zero residual DC. Therefore, the ion-beam irradiated LZO film is an efficient method as an LC alignment layer