In the semiconductor manufacturing clean room, contamination that directly affects process yield is managed through the operation of a monitoring system that measures molecular contamination in the air. In this study, I presented the component inspection method, test conditions, and judgment criteria through the life test of the solenoid valve that will be applied to the sampling module of the AMC Monitoring System.

The sampling test module of the existing AMC Monitoring System is constructed using tubes and fittings, so there has been a problem with molecular contaminants remaining in the system. This study demonstrated how a new manifold-type sampling test module without connecting tubes and fittings, and with super-hydrophobic coating improves residual molecular contaminants in the AMC Monitoring System through CDA purge when molecular contamination occurs in a clean room with a Semiconductor Fabrication.

In the present work, AMC/ZnO, AMC/Au, and AMC/Zeo conjugated membranes was prepared by vapor induced phase separation (VIPS) method and used for fouling study. each membrane the nanoparticles [Zinc oxide (ZnO), gold(Au) & Zeolite (Zeo)] was used separately. The prepared membranes are characterized by surface morphology and contact angle to investigate the influence of nanoparticles. The fouling resistant ability of the AMC conjugated membranes was analyzed using bovine serum albumin(BSA) protein and calculated the series model analysis by means of resistance. The fouled membranes was investigated to realize the surface properties considered as essential for fouling propensity. The experimental results correlate the changes in BSA separation efficiency and fouling resistance properties of AMC conjugated membranes with surface morphology.

Cellulose acetate-graft-(glycidylmethacrylate-g-polyethylene glycol) (CA-g- (GMA-g-PEG) was synthesized and incorporated into acetylated methyl cellulose (AMC) to prepare high rejection performance ultrafiltration membranes. H1-NMR and X-ray photoelectron spectroscopy study confirmed the successful synthesis of CA-g-(GMA-g-PEG) and utilized for hydrophilic modification agent. Polyethyleneimine(PEI), HumicAcid(HA) and Citric Acid(CA) ligands was used to bind the metal ions in aqueous solution.The rejection efficiency of AMC/CA-g-(GMA-g-PEG) blend membranes was studied in terms of pH, concentration and time. The successful developments would allow the safe and economical advancement in the fabrication of AMC blend membranes for ultrafiltration applications.

본 연구에서는 선행 5일부터 2일까지 아울러 선행강우량 기준을 다양하게 바꾸어가면서 적절한 AMC의 구분기준을 탐색하였다. AMC 구분기준은 관측된 CN(I) 및 CN(III)가 실제 CN(I) 및 CN(III)로 분류되는 빈도가 최대인 경우로 결정하였다. 이 기준을 적용하여 AMC 발생비율을 분석한 결과 선행 2일과 3일의 경우는 다양한 호우사상의 부족으로 인해 유의한 결과를 도출하기가 어려웠고, 선행 4일 및 5일의 경우 상대적으로 신뢰할 만한 결과

선행함수조건(AMC)에 따라 유출용적이 매우 다르게 나타날 수 있음에도 불구하고 우리나라에서의 강우-유출 해석에는 그 적용성에 대한 평가 없이 미국에서 개발된 AMC조건(SCS, 1972)이 일반적으로 그대로 이용되고 있다. 본 연구에서는 SCS의 CN 결정과정을 그대로 따라 평창강 유역의 장평 소유역에 대해 CN 값을 추정하고 이를 이용하여 AMC 조건을 평가하였다. 그 결과 CN(I), CN(II), CN(III)가 각각 72.1, 79.3, 76.