Considering the difficulties of the manufacturing industry by improving production efficiency in the era of high wages and aging in domestic automation facilities, automation facilities are considered an irreversible trend, but many serious related disasters are occurring due to the problems of increasing automation facilities due to the enlargement of manufacturing processes, line-up, and automation. The purpose of this study is to review the usage conditions and safety measures for industrial robots that are experiencing serious industrial accidents and are expected to continue to increase in facilities among automation facilities at the automation industrial site and propose ways to ensure the fundamental safety of the facilities at all times The suggestions are as follows. The purpose is to prevent safety accidents in advance by applying safety door aids to industrial sites and installing additional safety devices in safety slide door lock systems applied to safety fence doors of new and already installed facilities to detach safety keys and ensure that workers carry them at all times.

Thin-film shape technology is recognized for its core technology to enhance the technology of LCD, PDP, semiconductor manufacturing processes, hard disks and optical disks, and is widely used to form coated thin films of products. In addition, resistance (electron beam filament) technology for heating is used to manufacture filament for ion implants used in semiconductor manufacturing processes. By establishing an electronic beam filament production system and developing seven specifications of electronic beam filament, it is contributing to improving trade dynamics and increasing exports to Japan through localized media of theoretical imports to domestic companies. In this study, CAE analysis was performed after setting electron beam filament specification and development objectives, facilities and fabrication for electron beam filament production, electron beam filament JIG & fixture design and fabrication followed by electron beam filament prototype. Then, the automation and complete inspection equipment of the previously developed electronic beam filament manufacturing facilities was developed and researched to mass-produce them, to analyze and modify prototypes, design and manufacture automation facilities, and finally, to design and manufacture the complete inspection equipment. In this paper, design and manufacture of electronic beam filament automation facilities for mass production were dealted with.