The dismantling nuclear power plant is expected to continue to change the radiation working environment compared to the operating nuclear power plant. Contamination monitors and survey meters currently in use have limitations in accurate analysis source term and dose rates for continuous changes in radiation fields at dismantling sites. Due to these limitations, the use of semiconductor detectors such as HPGe and CZT detectors with excellent energy resolution and portability is increasing. The CZT detector performs as well as the HPGe detector, but there is no proven calibration procedure yet. Therefore, in this study, the HPGe calibration method was reviewed to derive implications for the CZT detector calibration method. The operating principle of a semiconductor detector that measures gamma emission energy converts them into electrical signals is the same. Two calibrations of HPGe detectors are performed according to the standard calibration procedure for semiconductor detectors for gamma-ray measurement issued by the Korea Association of Standards & Testing Organizations. The first is an energy calibration that calculates gamma-ray peak position measurements and relational expressions using standard source term that emit gamma-rays. The channel values for energy are measured using certified reference source term to determine radionuclides by identifying channels corresponding to the measured peak energy values. The second is the measurement efficiency of measuring the coefficient calibration device, which measures gamma rays emitted from the standard source term. The detector efficiency by sample or distance is measured in consideration of the shape, size, volume, and density of the calibration device. The HPGe detector performs calibration once every six months through a verified calibration method and is being used as a source term analyzer at the power plant. The CZT detector may also establish a procedure for identifying peak positions through energy calibration and calculating radioactivity through efficiency calibration. This will be a way to expand the usability of semiconductor detectors and further monitor radiation in a more effective way.