This research is to investigate the flow characteristics of micropump with two different types of diffuser outlet in micropump (straight and round). Four different outlet diameters(1mm, 1.5mm, 2mm at straight type of diffuser outlet and single outlet diameter(1mm) at round type are utilized for the flow analysis of the diffuser in micropump. Velocity and pressure distributions of fluid over the flow domain are numerically calculated for the shape optimum design of diffuser in micropump with uniform inlet velocity and pressure. According to the calculations of local maximum pressure at diffuser outlet, straight type of diffuser with larger diameter of diffuser outlet is of highest flow energy performance of the flow channel shapes in the present micropump.

Recently, products that a have 3-dimensional(3D) micro structure have been in wide use. To fabricate these 3D micro structures, several methods, such as stereo lithography, reflow process, and diffuser lithography, have been used. However, these methods are either very complicated, have limitations in terms of patterns dimensions or need expensive components. To overcome these limitations, we fabricated various 3D micro structures in one step using a pair of diffusers that diffract the incident beam of UV light at wide angles. In the experiment, we used positive photoresist to coat the Si substrate. A pair of diffusers(ground glass diffuser, opal glass diffuser) with Gaussian and Lambertian scattering was placed above the photomask in the passage of UV light in the photolithography equipment. The incident rays of UV light diffracted twice at wider angles while passing through the diffusers. After exposure, the photoresist was developed fabricating the desired 3D micro structure. These micro structures were analyzed using FE-SEM and 3D-profiler data. As a result, this dual diffuser lithography(DDL) technique enabled us to fabricate various microstructures with different dimensions by just changing the combination of diffusers, making this technology an efficient alternative to other complex techniques.