This study was conducted to verify the reliability of volatile organic compounds (VOCs) data derived from Selected Ion Flow Tube-Mass Spectrometers (SIFT-MS) measurements. In the previous study, the measurement reliability was validated using simultaneous measurements by SIFT-MS and gas chromatography-mass spectrometry (GS-MS), but in order to ensure more accuracy, and additional analysis was conducted by diluting standard gases (2 ppm) consisting of 10 types of VOCs mainly measured in industrial complexes (concentrations ranged from 0 to 500 ppb). As a result of 2 experiments, the SIFT-MS showed linearity and produced a coefficient of determination of over 0.99 for all cases. SIFT-MS has secured high measurement reliability, and it is considered to be able to efficiently manage VOCs emitted in industrial complexes.