We report on the capacitively coupled O2 plasma etching of PMMA and polycarbonate (PC) with a diffusion pump. Plasma process variables were process pressure and CCP power at 5 sccm O2 gas flow rate. Characterization was done in order to analyze etch rate, etch selectivity, surface roughness, and morphology using stylus surface profilometry and scanning electron microscopy. Self bias decreased with increase of process pressure in the range of 25~180 mTorr. We found an important result for optimum pressure for the highest etch rate of PMMA and PC, which was 60 mTorr. PMMA and PC had etch rates of 0.46 and 0.28 μm/min under pressure conditions, respectively. More specifically, etch rates of the materials increased when the pressure changed from 25 mTorr to 60 mTorr. However, they reduced when the pressure increased further after 60 mTorr. RMS roughnesses of the etched surfaces were in the range of 2.2~2.9 nm. Etch selectivity of PMMA to a photoresist was ~1.5:1 and that of PC was ~0.9:1. Etch rate constant was about 0.04 μm/minW and 0.02 μm/minW for PMMA and PC, respectively, with the CCP power change at 5 sccm O2 and 40 mTorr process pressure. PC had more erosion on the etched sidewall than PMMA did. The OES data showed that the intensity of the oxygen atomic peak (777.196 nm) proportionally increased with the CCP power.

teacher s efficiency is an important factor. Recently, some schools installed an air conditioner in classroom, while most schools selected the built-in type air conditioner. However, the study on a valuation of thermal environment is not sufficient, especially in classroom. It is insufficient that the study is a valuation of thermal environment which considered valuation about indoor thermal environment diffusion angle and air volume. In this work, the change of thermal environment was investigated for five kinds of air diffusion angle(15∘, 30∘, 45∘, 60∘, 90∘) for ceiling type air conditioner. The vector and temperature distributions of air in the room were calculated by a 3-dimensional numerical method. This study was also conducted to calculate the Mean Age of Air and Predicted Mean Vote(PMV). This analysis showed that 30-45° is the optimum angle of diffusion in cooling mode and in heating mode.