The ion-beam irradiated lanthanum zinc oxide (LZO) films were conducted as liquid crystal (LC) alignment layer to achieve uniform and homogeneous alignment of LC molecules. Polarized optical microscopy and the pre-tilt angle measurements revealed the alignment characteristics of LC molecules on the LZO film surface. Physical characteristics of the LZO film surface were analyzed by field emission scanning electron microscope and atomic force microscopy. The strong ion-beam irradiation on the LZO film changed surface rougher than before and induced physical anisotropic characteristics. Chemical composition of the LZO film was investigated by X-ray photoelectron spectroscopy and it was revealed that the ion-beam irradiation induced the breakage of the metal-oxide bonds. Due to this, anisotropic dipole moment which related with van der Waals force between LC molecules and alignment layer was induced. Because of this, LC molecules were anchored to the LZO film surface to achieve uniform LC alignment. Collecting the capacitance-voltage curve, residual DC of the LC cell with the LZO films was measured and it was verified that the LC cell with the LZO film had a nearly zero residual DC. Therefore, the ion-beam irradiated LZO film is an efficient method as an LC alignment layer