Silicon nanoparticle is a promising material for electronic devices, photovoltaics, and biological applications. Here, we synthesize silicon nanoparticles via CO2 laser pyrolysis and study the hydrogen flow effects on the characteristics of silicon nanoparticles using high resolution transmission electron microscopy (HRTEM), X-ray diffraction (XRD), and UV-Vis-NIR spectrophotometry. In CO2 laser pyrolysis, used to synthesize the silicon nanoparticles, the wavelength of the CO2 laser matches the absorption cross section of silane. Silane absorbs the CO2 laser energy at a wavelength of 10.6μm. Therefore, the laser excites silane, dissociating it to Si radical. Finally, nucleation and growth of the Si radicals generates various silicon nanoparticle. In addition, researchers can introduce hydrogen gas into silane to control the characteristics of silicon nanoparticles. Changing the hydrogen flow rate affects the nanoparticle size and crystallinity of silicon nanoparticles. Specifically, a high hydrogen flow rate produces small silicon nanoparticles and induces low crystallinity. We attribute these characteristics to the low density of the Si precursor, high hydrogen passivation probability on the surface of the silicon nanoparticles, and low reaction temperature during the synthesis.

For the application of nano-sized material in various fields, the evaluation of nano-sized material toxicity is important. In the present study, various concentrations of 200 nm-sized silicon dioxide nanoparticle suspension were intraperitonially injected into mice to identify the toxicity of silicon dioxide nanoparticle in vivo. In the hematological analysis of group II treated with silicon dioxide nanoparticle 100 mg/kg body weight, lymphocytes and monocytes were significantly different compared to the control group. In group III treated with silicon dioxide nanoparticle 200 mg/kg body weight, lymphocytes, monocytes and hemoglobin were significantly different compared to the control group. In blood biochemical analysis of group III, the concentration of AST, ALT, BUN, and creatinine were significantly different compared to the control group. Histopathologic examination of the kidney indicated a mild injury only in mice received 200 mg/kg silicon dioxide nanoparticle. According to the results of the present study, the significant differences in the hematological and blood biochemical analyses and abnormal histopathological findings in the mouse kidney may have been related to exposure to silicon dioxide nanoparticle.