논문 상세보기

수직형 LPE 장치에 의한 InGaAsP/GaAs 단결성 성장에 관한 연구 KCI 등재

A Study on the Single Crystal Growth of InGaAsP/GaAs by Vertical LPE System

  • 언어KOR
  • URLhttps://db.koreascholar.com/Article/Detail/260121
서비스가 종료되어 열람이 제한될 수 있습니다.
Journal of Korean Navigation and Port Reserch (한국항해항만학회지)
한국항해항만학회 (Korean Institute of Navigation and Port Research)
초록

Shortening the lasing wavelength(particularly below infrared ; the visible region) of laser diodes is very attractive because it can provide a wide range of applications in the fields of optical information, measurement, sensor, the development of medical instrument, and optical communication through plastic fibers. According to the recent researches on the field, InGaAsP/GaAs was suggested as a material for red-light laser. In this study, in order to grow InGaAsP/GaAs epitaxial layer on InGaAsP/GaAs by LPE, we used GaP and InP two phase solution technique for 670nm and 780 nm region, respectively. Through the X-ray diffraction measurement for the epitaxial layer grown from the experiments, we found that the lattice mismatch of In0.46Ga0.54As0.07P0.93/GaAs and In0.19Ga0.81As0.62P0.38/GaAs was about +0.3% and +0.1%, respectively.

저자
  • 홍창희
  • 조호성
  • 황상구
  • 오종환
  • 예병덕
  • 박윤호