Effects of superheated steam (SHS) temperature (120, 150, 180, 220°C) and time (2, 5, 8, 10 min) on physicochemical properties of garlic chips were examined. Higher the SHS temperature, a faster drying rate was observed due to the lower extent of water condensation on the garlic chip’s surface at the initial stage of treatment. Garlic chips treated at 220°C for 10 min showed the lowest water content and water activity. However appearance of these was inappropriate due to burnt spots on the surface. Scanning electron microscope analysis showed that garlic chips treated at higher SHS temperature showed compressed smooth cell layers at the surface with more compact internal structure due to higher degree of dehydration when compared to chips treated at lower temperature. These results confirmed that SHS could be utilized as an effective drying method for the production of garlic chips. Moreover, it is recommended that SHS treatment combined with other conventional post drying process would result in garlic chips with better quality in terms of color.