Based on the results of the prior study, we conducted a study of the DRE (destruction and removal efficiency) and carbonization of xylene using high electron beam energies. The irradiation intensity of electron beam energy was 30 mA, and the irradiation times were 5.7, 11.4, 22.8, and 45.6 sec. The absorbed dose were 124.23, 248.46, 496.91, and 993.83 kGy. Xylene was completely removed at 248.46 kGy, and the main by-products were carbon particles. Carbon particle formation was increased with increased absorbed dos. The carbon particles were generated as fine particles with a size of 0.5 to 1.0 μm. The most common oby-products of these particle were carbon black and graphite.