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Preparation of Ru-C Nano-composite Film by MOCVD and Electrode Properties for Oxygen Gas Sensor

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  • URLhttps://db.koreascholar.com/Article/Detail/4134
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한국분말재료학회(구 한국분말야금학회) (Korean Powder Metallurgy Institute)
초록

Ru-C nano-composite films were prepared by MOCVD, and their microstructures and their electrode properties for oxygen gas sensors were investigated. Deposited films contained Ru particles of 5-20 nm in diameter dispersed in amorphous C matrix. The AC conductivities associating to the interface charge transfer between Ru-C composite electrode and YSZ electrolyte were 100-1000 times higher than that of conventional paste-Pt electrodes. The emf values of the oxygen gas concentration cell constructed from the nano-composite electrodes and YSZ electrolyte showed the Nernstian theoretical values at low temperatures around 500 K. The response time of the concentration cell was 900 s at 500 K.

저자
  • Kimura
  • Teiichi
  • Goto
  • Takashi