Transparent conductive tungsten (W) doped indium oxide (In2O3; IWO) films were deposited at different substrate bias voltage (-Vb) conditions at room temperature on glass substrates by radio frequency (RF) magnetron sputtering and the influence of the substrate bias voltage on the optical and electrical properties was investigated. As the substrate bias voltage increased to -350 Vb, the IWO films showed a lower resistivity of 2.06 × 10-4 Ωcm. The lowest resistivity observed for the film deposited at -350 Vb could be attributed to its higher mobility, of 31.8 cm2/Vs compared with that (6.2 cm2/Vs) of the films deposited without a substrate bias voltage (0 Vb). The highest visible transmittance of 84.1 % was also observed for the films deposited at the -350 Vb condition. The X-ray diffraction observation indicated the IWO films deposited without substrate bias voltage were amorphous phase without any diffraction peaks, while the films deposited with bias voltage were polycrystalline with a low In2O3 (222) diffraction peak and relatively high intensity (431) and (046) diffraction peaks. From the observed visible transmittance and electrical properties, it is concluded that the opto-electrical performance of the polycrystalline IWO film deposited by RF magnetron sputtering can be enhanced with effective substrate bias voltage conditions.

1. 서 론
2. 실험 방법
3. 결과 및 고찰
4. 결 론
Acknowledgement

• 최재욱(울산대학교 첨단소재공학부 석사과정, 한국생산기술연구원 동남본부 첨단하이브리드생산기술센터 연구원) | Jae-Wook Choi (School of Materials Science and Engineering, University of Ulsan, Ulsan 44776, Republic of Korea, Korea Institute of Industrial Technology, Yangsan 50635, Republic of Korea)
• 이연학(울산대학교 첨단소재공학부 석사과정) | Yeon-Hak Lee (School of Materials Science and Engineering, University of Ulsan, Ulsan 44776, Republic of Korea)
• 박민성(울산대학교 첨단소재공학부 학부과정) | Min-Sung Park (School of Materials Science and Engineering, University of Ulsan, Ulsan 44776, Republic of Korea)
• 공영민(울산대학교 첨단소재공학부 교수) | Young-Min Kong (School of Materials Science and Engineering, University of Ulsan, Ulsan 44776, Republic of Korea)
• 김대일(울산대학교 첨단소재공학부 교수) | Daeil Kim (School of Materials Science and Engineering, University of Ulsan, Ulsan 44776, Republic of Korea) Corresponding author