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The In-situ Dressing of CMP Pad Conditioners with Novel Coating Protection

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  • URLhttps://db.koreascholar.com/Article/Detail/4430
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한국분말재료학회(구 한국분말야금학회) (Korean Powder Metallurgy Institute)
초록

Kinik Company pioneered diamond pad conditioners protected by DLC barrier ( Coating) back in 1999 (Sung & Lin, US Patent 6,368,198). Kink also evaluated Cermet Composite Coating (CCC or , patent pending) with a composition that grades from a metallic (e.g. stainless steel) interlayer to a ceramic (e.g. or SiC) exterior. The metallic interlayer can form metallurgical bond with metallic matrix on the diamond pad conditioner. The ceramic exterior is both wear and corrosion resistant. The gradational design of coating will assure its strong adherence to the substrate because there is no weak boundary between coating and substrate.

저자
  • Sung
  • James-C.
  • Kan
  • Ming-Chi