Customers are generally requiring a variety of products, earlier due date, and lower price. A manufacturing process needs the efficient scheduling to meet those customer's requirements. This study proposes the novel algorithm named MJA(Minimum Job completion time and AGV time) that increases the performance of machines and AGV(Automated Guided Vehicles) in many kinds of job types. MJA optimizes the bottleneck of machines and efficiency of AGV with considering two types of dispatching at the same time. Suggested algorithm was compared with existing heuristic methods by several simulations, it performed better for reducing the time of tardiness.

Overlay parameter control of the semiconductor photolithography process is researched in this paper. Overlay parameters denote the error in superposing the current pattern to the pattern previously created. The reduction of the overlay deviation is one of the key factors in improving the quality of the semiconductor products. The semiconductor process is affected by numerous environment and equipment factors. Through process condition prediction and control, the overlay inaccuracy can be reduced. Generally, three types of process condition change exist; uncontrollable white noise, slowly changing drift, and abrupt condition shift. To effectively control the aforementioned process changes, control scheme using adaptive deadband is proposed. The suggested approach and existing control method are cross evaluated through simulation.