P-type의 단결정 실리콘 위에 1000a의 열산화막을 성장시킨후 5500a의 다결정 실리콘으로 증착된 시료를 가지고 HBr/Cl2/He-O2 혼합기체로 식각할 때 시료의 식각 특성에 관한 H2-O2 기체함량. RF 전력, 압력에 대한 영향을 XPS(X-ray photoelectron Spectroscopy)와 SEM(Scanning Electron Microscopy)으로 조사하였다. HBr/Cl2/He-O2 혼합기체로 식각되는 동안 형성된 다결정 실리콘 식각속도는 H2-O2 함량 증가에 따라 증가하였으며 식각잔유물은 RF 전력과 압력변화에 의해 영향은 받지 않는 것으로 나타났으며, 다결정 실리콘 측벽에서의 증착속도는 낮은 RF전력과 높은 압력에서 높게 나타났다. 다결정 실리콘 식각 잔유물의 결합에너지는 안정한 SiO2인 열산화막의 경우보다 높으므로 식각 잔유물은 SiOχ(χ>2)의 화합결합을 가지는 산화물과 같은 잔유물로 생각된다.

Morus alba (Mulberry) leaves were exposed to fermentation for varying amounts of time: no fermentation (0 min, MANF), medial fermentation (10 h, MAMF), and full fermentation (24 h, MAFF). The chemical compositions of the teas were determined and compared with those of commercial Camellia sinensis teas. The results showed that mulberry leaf teas contained significantly higher amounts of ash and fat than Camellia sinensis tea. Compared with Camellia sinensis teas, all mulberry leaf teas contained significantly more total free amino acids (24.26~54.25mg L-glutamic acid equivalent g-1), but the concentration of caffeine was relatively low for mulberry leaf teas. High thiamine, riboflavin, and niacin contents were found in all mulberry leaf teas, but ascorbic acid and pyridoxine were found at higher levels in Camellia sinensis teas than in mulberry leaf teas. Color measurements demonstrated that mulberry leaf tea infusions generally had lower a* (greenness) and b* (yellowness) values than Camellia sinensis tea infusions. All infusions exhibited low turbidity levels (less than 10%). The contents of total phenols were measured as 71.8 and 74.9mg 100 ml-1 infusion in MANF and MAFF, respectively, but the MAMF tea infusion showed significantly lower total phenols (64.6mg 100ml-1 infusion). The total flavonoid contents of mulberry leaf tea infusions were lower (8.9~20.6mg 100 ml-1 infusion) than those of Camellia sinensis teas and thus had lower antioxidant capacities (DPPH: 326.8~526.9 μm trolox equivalent g-1 and FRAP: 364.6~387.6 μm trolox equivalent g-1) than Camellia sinensis teas. The amounts of γ-aminobutyric acid (GABA) and rutin were higher in fermented mulberry leaf teas; the level of GABA increased with increasing fermentation time and the content was highest in MAFF, but rutin content was highest in MAMF.