Recently, there has been a growing demand for soft magnetic materials with high conversion characteristics, due to the trend of electric devices to higher-frequency range. For ruduceing core loss in the high-frequency range, using finely grained and high-resistivity Fe-based alloy powder is most efficient methods. But, conventionally, there's been a compressibility problem for such powder. In this work, Fe-based alloy powder that offers both high resistivity and high compressibility was developed by studyuing composition of the powder, and reduction of core loss of P/M soft magnetic materials in the high frequency range was achieved.