A non-equilibrium powder metallurgy processing such as an MA/SPS (Mechanical Alloying / Spark Plasma Sintering) process is examined in a Ti-48moll%Al. TiAl intermetallic compound is a potential light-weight/high-temperature structural material. One of the major problems, however, limiting the practical use of the material is its poor workability. From this point, the powder metallurgy (PM) processing route has been attractive alternative of the conventional processing for such material The MA/SPS process is able to apply to a LIGA process. Optimization of the pseudo-superplasticity enables to fabricate micro-parts made of fine grained ceramics composites of TiAl by the LIGA process.