The effects of post-CMP cleaning on the chemical and galvanic corrosion of copper (Cu) and titanium(Ti) were studied in patterned silicon (Si) wafers. First, variation of the corrosion rate was investigated as afunction of the concentration of citric acid that was included in both the CMP slurry and the post-CMP solution.The open circuit potential (OCP) of Cu decreased as the citric acid concentration increased. In contrast withCu, the OCP of titanium (Ti) increased as this concentration increased. The gap in the OCP between Cu andTi increased as citric acid concentration increased, which increased the galvanic corrosion rate between Cu andTi. The corrosion rates of Cu showed a linear relationship with the concentrations of citric acid. Second, theeffect of Triton X-100®, a nonionic surfactant, in a post-CMP solution on the electrochemical characteristics ofthe specimens was also investigated. The OCP of Cu decreased as the surfactant concentration increased. Incontrast with Cu, the OCP of Ti increased greatly as this concentration increased. Given that Triton X-100®changes its micelle structure according to its concentration in the solution, the corrosion rate of eachconcentration was tested.

Nano-crystalline hydroxyapatite (HAp) films were formed at the Ti surface by a single-step microarc oxidation (MAO), and HAp-zirconia composite (HZC) films were obtained by subsequent chemical vapor deposition (CVD) of zirconia onto the HAp. Through the CVD process, zero- and one-dimensional zirconia nanostructures having tetragonal crystallinity (t-ZrO2) were uniformly distributed and well incorporated into the HAp crystal matrix to form nanoscale composites. In particular, (t-ZrO2) was synthesized at a very low temperature. The HZC films did not show secondary phases such as tricalcium phosphate (TCP) and tetracalcium phosphate (TTCP) at relatively high temperatures. The most likely mechanism for the formation of the t-ZrO2 and the pure HAp at the low processing temperature was proposed to be the diffusion of Ca2+ ions. The HZC films showed increasing micro-Vickers hardness values with increases in the t-ZrO2 content. The morphological features and phase compositions of the HZC films showed strong dependence on the time and temperature of the CVD process. Furthermore, they showed enhanced cell proliferation compared to the TiO2 and HAp films most likely due to the surface structure change.

Conjugated nanocrystals using CdSe/ZnS core/shell nanocrystal quantum dots modified by organic linkers and glucose oxidase (GOx) were prepared for use as biosensors. The trioctylphophine oxide (TOPO)-capped QDs were first modified to give them water-solubility by terminal carboxyl groups that were bonded to the amino groups of GOx through an EDC/NHS coupling reaction. As the glucose concentration increased, the photoluminescence intensity was enhanced linearly due to the electron transfer during the enzymatic reaction. The UV-visible spectra of the as-prepared QDs are identical to that of QDs-MAA. This shows that these QDs do not become agglomerated during ligand exchanges. A photoluminescence (PL) spectroscopic study showed that the PL intensity of the QDs-GOx bioconjugates was increased in the presence of glucose. These glucose sensors showed linearity up to approximately 15 mM and became gradually saturated above 15 mM because the excess glucose did not affect the enzymatic oxidation reaction past that amount. These biosensors show highly sensitive variation in terms of their photoluminescence depending on the glucose concentration.

Well-aligned Zinc oxide (ZnO) nanowires were synthesized on silicon substrates by a carbothermal evaporation method using a mixture of ZnO and graphite powder with Au thin film was used as a catalyst. The XRD results showed that as-prepared product is the hexagonal wurzite ZnO nanostructure and SEM images demonstrated that ZnO nanowires had been grown along the [0001] direction with hexagonal cross section. As-grown ZnO nanowires were coated with glucose oxidase (GOx) for glucose sensing. Glucose converted into gluconic acid by reaction with GOx and two electrons are generated. They transfer into ZnO nanowires due to the electric force between electrons and the positively charged ZnO nanostructures in PBS. Photoluminescence (PL) spectroscopy was employed for investigating the movements of electrons, and the peak PL intensity increased with the glucose concentration and became saturated when the glucose concentration is above 10 mM. These results demonstrate that ZnO nanostructures have potential applications in biosensors.

ZnO/ZnS core/shell nanocrystals (~5-7 nm in diameter) with a size close to the quantum confinement regime were successfully synthesized using polyol and thermolysis. X-ray diffraction (XRD) and high-resolution transmission electron microscopy (HRTEM) analyses reveal that they exist in a highly crystalline wurtzite structure. The ZnO/ZnS nanocrystals show significantly enhanced UV-light emission (~384 nm) due to effective surface passivation of the ZnO core, whereas the emission of green light (~550 nm) was almost negligible. They also showed slight photoluminescence (PL) red-shift, which is possibly due to further growth of the ZnO core and/or the extension of the electron wave function to the shell. The ZnO/ZnS core/shell nanocrystals demonstrate strong potential for use as low-cost UV-light emitting devices.