본 논문에서는 웨이퍼 레벨 밀봉 실장된 수직 운동 가속도 신호를 감지할 수 있는 초소형 Z축 가속도 센싱 엘리먼트를 제작하였다. 초소형 Z축 가속도 센싱 엘리먼트는 수직 방향의 정전용량 변화를 필요로 하기 때문에 단일 기판상에 수직 단차의 형성을 가능케 하는 확장된 희생 몸체 미세 가공 기술 (Extended Sacrificial Bulk Micromachining, ESBM) 을 이용하여 제작되었다. 확장된 희생 몸체 미세 가공 기술을 이용하면 정렬오

In the velocimeter, the ultrasonic pulse signal is used for measuring the profile velocity of moving targets distributed in space because of the merits of its high distance resolution and harmless affect to the human body. The velocity reading in conventional ultrasonic pulsed velocimeter depends on the wave pattern reflecting the spatial distribution of scatters and includes observational error due to the signal processing of analyzing pulse signal. In this paper, we evaluate an influence of the received waveform of pulsed signal on the velocity information by setting a model. Subsequently, in order to improve the distance resolution and to obtain precise velocity information without the influence of the spatial distribution of scatterers, we propose a new method for the analysis of Doppler pulsed signal, in which the pulsed signal is transformed into a phase function with local data. Finally, it is confirmed that the performance of the velocimeter is more improved in the proposed method than in the conventional one.