In this study, the decomposition of gas-phase TCE, Benzene and Toluene, in air streams by direct UV Photolysis and UV/TiO2 process was studied. For direct UV Photolysis, by regressing with computer calculation to the experimental results the value of reaction rate constant k of TCE, Toluene and Benzene in this work were determined to be 0.00392s-1, 0.00230s-1 and 0.00126s-1, respectively. And the adsorption constant K of TCE, Toluene and Benzene in this work were determined to be 0.0519mol-1 ,0.0313mol-1 and 0.0084mol-1, respectively. For UV/TiO2 system by regressing with computer calculation to the experimental results the value of reaction rate constant k of TCE, Toluene, and Benzene in this work were determined to be 5.74g/ℓ․min, 3.85g/ℓ․min, and 1.18g/ℓ․min, respectively. And the catalyst adsorption constant K of TCE, Toluene, and Benzene in this work were determined to be 0.0005m3/mg, 0.0043m3/mg and 0.0048m3/mg, respectively.