In order to supply the high-quality electric power, several researches have been conducted. For the high-quality power, it is necessary to inspect the power lines and insulators before the lines or insulators are disconnected or damaged. However, it is not enough to inspect all the power lines by human inspectors. In previous study, a power line inspection robot was developed to investigate the power lines and insulators. According to replace the human operators by the robot, the inspection robot has several advantages: the improved working conditions, machine accuracy, and the prevention of accident. However, the robot has some defects in its heavyweight. In this study, a lightweight inspection robot has been developed using a RP and a vacuum casting. And, this study developed a fault detection monitoring program for the high voltage equipment using a microphone which detects the location of fault and the thermal imaging and CCD cameras which verifies the fault and stores the image, respectively.

There has been a huge progress in semiconductor manufacturing processes such as reduction of the design rule(DR) and development of multi-processes. And, semiconductor industries have steadily extended its business and market share by reducing the design rule(DR) and enlarging the wafer size as well as by resolving many difficult technical problems through various noble approaches in order to reduce the production cost and to improve the yield. In semiconductor manufacturing, there is a significant difference in the number of memory chips produced according to the wafer size, wafer yield, and the level of the design rule even though the same number of wafers were put to the manufacturing process. So, almost all semiconductor manufacturing companies reach the conclusion that the enlarged size of wafer should be adopted in order to enhance the productivity and reduce the production cost. Thus, in this study, we investigate the specifications of the key functions and capabilities of the necessary modules in the yield analysis and improvement system required to acquire the stationary wafer yield with considering the 450mm wafer manufacturing system. Then the results of this research will be helpful for constructing the advanced yield analysis and improvement system called Real-Time Fault Monitoring and Detection (RTFMD) system.