Mo-based thin films are frequently used as back electrode materials because of their low resistivity and high crystallinity in CIGS chalcopyrite solar cells. Mo:Na/Mo bilayer thin films with 1μm thickness were deposited on soda lime glass by varying the thickness of each layer using dc-magnetron sputtering. The effects of the Mo:Na layer on morphology and electrical property in terms of resistivity were systematically investigated. The resistivity increased from 159μΩcm to 944μΩcm; this seemed to be caused by increased surface defects and low crystallinity as the thickness of Mo:Na layer increased from 100 nm to 500 nm. The surface morphologies of the Mo thin films changed from a somewhat coarse fibrous structures to irregular and fine celled structures with increased surface cracks along the cell boundaries as the thickness of Mo:Na layer increased. Na contents varied drastically from 0.03 % to 0.52 % according to the variation of Mo:Na layer thickness. The change in Na content may be ascribed to changes in surface morphology and crystallinity of the thin films.

Mo thin films were used for the back electrode because of the low resistivity in the Mo/CuInGaSe2 contact inchalcopyrite solar cells. 1µm thick Mo thin films were deposited on soda lime glass by varying the Ar pressure with the dc-magnetron sputtering process. The effects of the Ar pressure on the morphology of the Mo back electrode were studied andthe relationships between the morphology and electro-optical properties, namely, the resistivity as well as the reflectance of theMo thin films, were investigated. The resitivity increased from 24µΩ·cm to 11833µΩ·cm; this was caused by the increasedsurface defect and low crystallinity as the Ar pressure increased from 3×10−3 to 3×10−2Torr. The surface morphologies ofthe Mo thin films changed from somewhat coarse fibrous structures to irregular and fine celled strucutures with increased surfacecracks along the cell boundaries, as the Ar pressure increased from 3×10−3 to 3×10−2Torr. The changes of reflectances in thevisible light range with Ar pressures were mainly attributed to the surface morphological changes of the Mo thin films. Thereflectance in the visible light range showed the highest value of 45% at 3×10−3Torr and decreased to 18.5% at 3×10−2Torr.