In this study, we prepared thin composite membranes in which a support layer and a selective layer are covalently bonded in a simple method. The graft polymerization was carried out using UV/Ozone on a commercial Poly(sulfone) ultrafiltration membrane with Poly((ethylene glycol) methyl ether methacrylate) (PEGMA) possessing CO2 affinity. As a result, nano-pores on the surface membrane were covered with PEGMA. The covalent bonding of the composite membranes has the advantage of improving stability and weatherability. In addition, due to the thin selective layer formed by the graft polymerization, highly gas permeation characteristics are exhibited, and efficient process performance can be expected. The final composite membranes were investigated in terms of their chemical structures and elements, and gas permeation properties.

In this study, we prepared thin composite membranes in which a support layer and a selective layer are covalently bonded in a simple method. The graft polymerization was carried out using UV/Ozone on a commercial Poly(sulfone) (PSf) ultrafiltration membrane with Poly((ethylene glycol) methyl ether methacrylate) (PEGMA) possessing CO2affinity. As a result, nano-pores on the surface membrane were covered with PEGMA. The covalent bonding of the composite membranes has the advantage of improving stability. In addition, due to the thin selective layer formed by the graft polymerization, highly gas permeation characteristics are exhibited, and efficient process performance can be expected. The final composite membranes were investigated in terms of their chemical structures and elements, morphology, and gas permeation properties.

반도체 소자가 고집적화 됨에 따라 단위공정의 수가 증가하게 되었고 동시에 실리콘 기판의 오염에 대한 문제가 증가하였다. 실리콘 기판의 주 오염물로는 유기물, 파티클, 금속분순물 등이 있으며 특히, Cu와 Fe과 같은 금속불순물은 이온주입 공정, reactive ion etching, photoresist ashing과 같은 실 공정 중에 1011-1013atoms/㎤정도로 오염이 되고 있다. 그러나 금속불순물 중 Cu와 같은 전기음성도가 실리콘 보다 큰 오염물질은 일반적인 습석세정방법으로는 제거하기 힘들다. 따라서 본 연구에서는 Cu와 Fe과 같은 금속불순물을 제거할 목적을 건식과 습식 세정방법을 혼합한 UV/ozone과 HF세정을 제안하여 실시하였다. CuCI2와 FeCI2 표준용액으로 실리콘 기판을 인위적 오염한 후 split 1(HF-only), split 2 (UV/ozone+HF), split 3 (UV/ozone + HF 2번 반복), split 4(UV/ozone-HF 3번 반복)를 실시하였고 TXRF(Total Reflection X-Ray Fluorescence)와 AFM(Atomic Force Microscope)으로 금속불순물 제거량과 표면거칠기를 각각 측정하였다. 또한 contact angle 측정으로 세정에 따른 표면상태도 측정하였다. TXRF 측정결과 split 4가 가장 적은 양의 금속불순물 잔류량을 보였으며 AFM 분석을 통한 표면거칠기도 가장 작은 RMS 값을 나타내었다. Contact angle 측정 결과 UV/ozone 처리는 친수성 표면을 형성하였고 HF처리는 소수성 표면을 형성하였다.

The average ratio of the daily UV-B to total solar (75) irradiance at Busan (35.23˚N, 129.07˚E) in Korea is found as 0.11%. There is also a high exponential relationship between hourly UV-B and total solar irradiance: UV-B=exp (a× (75-b))(R2=0.9 0.93). The daily variation of total ozone is compared with the UV-B irradiance at Pohang (36.03˚N, 129.40˚E) in Korea using the Total Ozone Mapping Spectrometer (TOMS) data during the period of May to July in 2005. The total ozone (TO) has been maintained to a decreasing trend since 1979, which leading to a negative correlation with the ground-level UV-B irradiance doting the given period of cloudless day: UV-B=239.23-0.056 TO (R2=0.5 0.52). The statistical predictions of daily total ozone are analyzed by using the data of the Brewer spectrophotometer and TOMS in East Asia including the Korean peninsula. The long-term monthly averages of total ozone using the multiplicative seasonal AutoRegressive Integrated Moving Average (ARIMA) model are used to predict the hourly mean UV-B irradiance by interpolating the daily mean total ozone far the predicting period. We also can predict the next day's total ozone by using regression models based on the present day's total ozone by TOMS and the next day's predicted maximum air temperature by the Meteorological Mesoscale Model 5 (MM5). These predicted and observed total ozone amounts are used to input data of the parameterization model (PM) of hourly UV-B irradiance. The PM of UV-B irradiance is based on the main parameters such as cloudiness, solar zenith angle, total ozone, opacity of aerosols, altitude, and surface albedo. The input data for the model requires daily total ozone, hourly amount and type of cloud, visibility and air pressure. To simplify cloud effects in the model, the constant cloud transmittance are used. For example, the correlation coefficient of the PM using these cloud transmissivities is shown high in more than 0.91 for cloudy days in Busan, and the relative mean bias error (RMBE) and the relative root mean square error (RRMSE) are less than 21% and 27%, respectively. In this study, the daily variations of calculated and predicted UV-B irradiance are presented in high correlation coefficients of more than 0.86 at each monitoring site of the Korean peninsula as well as East Asia. The RMBE is within 10% of the mean measured hourly irradiance, and the RRMSE is within 15% for hourly irradiance, respectively. Although errors are present in cloud amounts and total ozone, the results are still acceptable.